The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method

The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method

Electron beam induced deposition (EBID) is a method for high-resolution direct material deposition from the gas phase in the Scanning Electron Microscopy (SEM) onto a substrate. In this project, EBID method has been used to deposit the square shape carbon structure on the substrate using the resid...

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Bibliographic Details
Main Author: Muhammad Afiq Abdul Aziz
Other Authors: Shaiful Nizam Mohyar (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Microelectronics
Electron beams
Semiconductors
Electrons > Beams
Electron microscopy
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1961
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/1961

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