The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method

• Main Author: Muhammad Afiq Abdul Aziz
• Other Authors: Shaiful Nizam Mohyar (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Microelectronics; Electron beams; Semiconductors; Electrons > Beams; Electron microscopy
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1961
• Institution: Universiti Malaysia Perlis

Electron beam induced deposition (EBID) is a method for high-resolution direct material deposition from the gas phase in the Scanning Electron Microscopy (SEM) onto a substrate. In this project, EBID method has been used to deposit the square shape carbon structure on the substrate using the resid...