Formation of Si nanostructure using size reduction technique

• Main Authors: Th., Shikra Dhahi, Uda, Hashim, Prof. Dr., N. M., Ahmed
• Other Authors: [e-mail]
• Format: Working Paper
• Language: English
• Published: Universiti Malaysia Perlis (UniMAP) 2012
• Subjects: Si–SiO2 substrate; Photolithography; Scanning electron microscope (SEM)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/21498
• Institution: Universiti Malaysia Perlis

International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia.