Silicon nanowire sensor by mix and match lithography process: Fabrication and characterization

Link to publisher's homepage at http://www.aip.org/

Saved in:

Bibliographic Details
Main Author:	Uda, Hashim, Prof. Dr.
Other Authors:	uda@unimap.edu.my
Format:	Working Paper
Language:	English
Published:	American Institute of Physics 2013
Subjects:	Biosensor CMOS process E-beam lithography Nanowires Silicon
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/26633
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Universiti Malaysia Perlis
Language:	English

Similar Items