Subnanometer poly-silicon gap structure formation: Comparison study between size expansion and size reduction

Subnanometer poly-silicon gap structure formation: Comparison study between size expansion and size reduction

Link to publisher's homepage at http://www.aip.org/

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Bibliographic Details
Main Authors: Uda, Hashim, Prof. Dr., Nazwa, Taib, Thikra, S. Dhahi
Other Authors: uda@unimap.edu.my
Format: Working Paper
Language:English
Published: American Institute of Physics. 2013
Subjects:
E-beam lithography (EBL)
Lateral nanogap
Single molecule
Size Expansion Technique (SET)
Size Reduction Technique (SRT)
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/26634
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Institution: Universiti Malaysia Perlis
Language: English
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Summary:Link to publisher's homepage at http://www.aip.org/

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