Subnanometer poly-silicon gap structure formation: Comparison study between size expansion and size reduction

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Bibliographic Details
Main Authors:	Uda, Hashim, Prof. Dr., Nazwa, Taib, Thikra, S. Dhahi
Other Authors:	uda@unimap.edu.my
Format:	Working Paper
Language:	English
Published:	American Institute of Physics. 2013
Subjects:	E-beam lithography (EBL) Lateral nanogap Single molecule Size Expansion Technique (SET) Size Reduction Technique (SRT)
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/26634
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Institution:	Universiti Malaysia Perlis
Language:	English

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