Resist uniformity evaluation through swing curve phenomena

Resist uniformity evaluation through swing curve phenomena

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Bibliographic Details
Main Authors: Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
Other Authors: uda@unimap.edu.my
Format: Article
Language:English
Published: INSInet Publications 2013
Subjects:
Clearing point (dose to clear)
Coater
Critical dimension
Elipsometer
Stepper
Wafer
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/26639
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/26639

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