Resist uniformity evaluation through swing curve phenomena

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Bibliographic Details
Main Authors:	Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
Other Authors:	uda@unimap.edu.my
Format:	Article
Language:	English
Published:	INSInet Publications 2013
Subjects:	Clearing point (dose to clear) Coater Critical dimension Elipsometer Stepper Wafer
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/26639
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Institution:	Universiti Malaysia Perlis
Language:	English

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