Simulation and characterization of MEMS piezoelectric thermal actuator

Simulation and characterization of MEMS piezoelectric thermal actuator

The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Po...

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Bibliographic Details
Main Authors: Palianysamy, Moganraj, Raman, Sathisvaran, Hasnizah, Aris, Retnasamy, Vithyacharan
Other Authors: dravid87@hotmail.com
Format: Working Paper
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2013
Subjects:
Thermal actuator
Piezoelectric
Zinc Oxide
PZT-4
PZT-5.
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/30791
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/30791

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