Simulation and characterization of MEMS piezoelectric thermal actuator
The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Po...
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Universiti Malaysia Perlis (UniMAP)
2013
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my.unimap-307912013-12-23T08:01:46Z Simulation and characterization of MEMS piezoelectric thermal actuator Palianysamy, Moganraj Raman, Sathisvaran Hasnizah, Aris Retnasamy, Vithyacharan dravid87@hotmail.com hasnizah@unimap.edu.my Thermal actuator Piezoelectric Zinc Oxide PZT-4 PZT-5. The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Postgraduates Student Association Ireland (MyPSI), 18th - 19th June 2012 at Putra World Trade Center (PWTC), Kuala Lumpur, Malaysia. The development of low cost MEMS devices has been the main focus in recent years. This leads to discovery of MEMS materials and suitable devices. Magnetostatic and electrostatic actuators produce relatively small forces; therefore it is hard to achieve large displacement. Therefore there is a need to achieve larger displacement by using different types of materials. One of the device is thermal actuator which is operates when voltage is applied. This project focuses on the materials that used to simulate the two different designs. The materials that used in this project are called piezoelectric materials or smart materials. When the voltage is applied on the thermal actuator, there will be a mechanical movement which is operates the actuator based on the thermal energy. There are three analysis were done on the materials to observe the difference in results. The nodal displacement, electric field, and stress tensor of thermal actuator was investigated by using two different types of designs. Different materials show different results due to different material properties. The materials that used in this project are Zinc Oxide, PZT-4 and PZT-5. 2013-12-23T08:01:46Z 2013-12-23T08:01:46Z 2012-06-18 Working Paper p. 737 - 742 978-967-5760-11-2 http://hdl.handle.net/123456789/30791 en Proceedings of the The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012); Universiti Malaysia Perlis (UniMAP) |
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Thermal actuator Piezoelectric Zinc Oxide PZT-4 PZT-5. |
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Thermal actuator Piezoelectric Zinc Oxide PZT-4 PZT-5. Palianysamy, Moganraj Raman, Sathisvaran Hasnizah, Aris Retnasamy, Vithyacharan Simulation and characterization of MEMS piezoelectric thermal actuator |
| description |
The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Postgraduates Student Association Ireland (MyPSI), 18th - 19th June 2012 at Putra World Trade Center (PWTC), Kuala Lumpur, Malaysia. |
| author2 |
dravid87@hotmail.com |
| author_facet |
dravid87@hotmail.com Palianysamy, Moganraj Raman, Sathisvaran Hasnizah, Aris Retnasamy, Vithyacharan |
| format |
Working Paper |
| author |
Palianysamy, Moganraj Raman, Sathisvaran Hasnizah, Aris Retnasamy, Vithyacharan |
| author_sort |
Palianysamy, Moganraj |
| title |
Simulation and characterization of MEMS piezoelectric thermal actuator |
| title_short |
Simulation and characterization of MEMS piezoelectric thermal actuator |
| title_full |
Simulation and characterization of MEMS piezoelectric thermal actuator |
| title_fullStr |
Simulation and characterization of MEMS piezoelectric thermal actuator |
| title_full_unstemmed |
Simulation and characterization of MEMS piezoelectric thermal actuator |
| title_sort |
simulation and characterization of mems piezoelectric thermal actuator |
| publisher |
Universiti Malaysia Perlis (UniMAP) |
| publishDate |
2013 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/30791 |
| _version_ |
1643795628801654784 |