Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler
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my.unimap-321262014-02-24T04:53:14Z Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler Qazi Mohammad, Humayun Uda, Hashim, Prof. Dr. uda@unimap.edu.my qhumayun2@gmail.com Chrome mask Lab-on-chip Microgap Photoresist Spin coating Surface nanoprofiler Link to publisher's homepage at http://www.scientific.net A compact nanolaboratory on single chip is one of the challenging tasks for future reproductively of sensitive and selective lab-on-chip. This paper reports a simple and controllable technique for patterning microgap structures on (PR-1 2000A) positive photoresist. For the pattern transformation conventional lithography technique was used integrated with precise resolution mask namely chrome mask. This technique provides an especially simple method for the formation of micro features sizes of gaps onto the photoresist. The thickness of developed microgap structures on photoresist directly relates with the coating speed of spin coater. 2014-02-24T04:53:14Z 2014-02-24T04:53:14Z 2012-12 Article Advanced Materials Research, vol.626, 2012, pages 942-947 1022-6680 http://dspace.unimap.edu.my:80/dspace/handle/123456789/32126 http://www.scientific.net/AMR.626.942 en Scientific.Net |
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English |
| topic |
Chrome mask Lab-on-chip Microgap Photoresist Spin coating Surface nanoprofiler |
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Chrome mask Lab-on-chip Microgap Photoresist Spin coating Surface nanoprofiler Qazi Mohammad, Humayun Uda, Hashim, Prof. Dr. Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler |
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Link to publisher's homepage at http://www.scientific.net |
| author2 |
uda@unimap.edu.my |
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uda@unimap.edu.my Qazi Mohammad, Humayun Uda, Hashim, Prof. Dr. |
| format |
Article |
| author |
Qazi Mohammad, Humayun Uda, Hashim, Prof. Dr. |
| author_sort |
Qazi Mohammad, Humayun |
| title |
Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler |
| title_short |
Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler |
| title_full |
Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler |
| title_fullStr |
Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler |
| title_full_unstemmed |
Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler |
| title_sort |
parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler |
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Scientific.Net |
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2014 |
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http://dspace.unimap.edu.my:80/dspace/handle/123456789/32126 |
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