Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler

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Bibliographic Details
Main Authors:	Qazi Mohammad, Humayun, Uda, Hashim, Prof. Dr.
Other Authors:	uda@unimap.edu.my
Format:	Article
Language:	English
Published:	Scientific.Net 2014
Subjects:	Chrome mask Lab-on-chip Microgap Photoresist Spin coating Surface nanoprofiler
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/32126
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Institution:	Universiti Malaysia Perlis
Language:	English

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