Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique

Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique

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Bibliographic Details
Main Authors: Mohammad Nuzaihan, Md Nor, Uda, Hashim, Prof. Dr., Siti Fatimah, Abdul Rahman, Tijjani Adam, Shuwa
Other Authors: m.nuzaihan@unimap.edu.my
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
Electron beam lithography
ma-N2400 negative resist
Negative pattern scheme
Silicon nanowire
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33557
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Institution: Universiti Malaysia Perlis
Language: English
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