Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
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2014
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my.unimap-335572014-04-09T06:46:49Z Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique Mohammad Nuzaihan, Md Nor Uda, Hashim, Prof. Dr. Siti Fatimah, Abdul Rahman Tijjani Adam, Shuwa m.nuzaihan@unimap.edu.my uda@unimap.edu.my aeiou_0410@yahoo.co.uk tijjaniadam@yahoo.com Electron beam lithography ma-N2400 negative resist Negative pattern scheme Silicon nanowire Link to publisher's homepage at http://www.ttp.net/ In this work, we report the used of Negative Pattern Scheme (NPS) by Electron Microscope Based Electron Beam Lithography (EBL) Technique in connection with scanning electron microscope (SEM) for creating extremely fine nanowires. These patterns have been designed using GDSII Editor and directly transferred on the sample coated with ma-N 2400 Series as the negative tone e-beam resist. The NPS designs having line width of approximately 100 nm are successfully fabricated at our lab. The profile of the nanowire can be precisely controlled by this technique. The optical characterization that is applied to check the nanowires structure using SEM and Atomic Force Microscopy (AFM). 2014-04-09T06:46:49Z 2014-04-09T06:46:49Z 2014 Article Advanced Materials Research, vol.832, 2014, pages 419-422 1662-8985 http://dspace.unimap.edu.my:80/dspace/handle/123456789/33557 http://www.scientific.net/AMR.832.419 10.4028/www.scientific.net/AMR.832.419 en Trans Tech Publications |
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Electron beam lithography ma-N2400 negative resist Negative pattern scheme Silicon nanowire |
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Electron beam lithography ma-N2400 negative resist Negative pattern scheme Silicon nanowire Mohammad Nuzaihan, Md Nor Uda, Hashim, Prof. Dr. Siti Fatimah, Abdul Rahman Tijjani Adam, Shuwa Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique |
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m.nuzaihan@unimap.edu.my |
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m.nuzaihan@unimap.edu.my Mohammad Nuzaihan, Md Nor Uda, Hashim, Prof. Dr. Siti Fatimah, Abdul Rahman Tijjani Adam, Shuwa |
| format |
Article |
| author |
Mohammad Nuzaihan, Md Nor Uda, Hashim, Prof. Dr. Siti Fatimah, Abdul Rahman Tijjani Adam, Shuwa |
| author_sort |
Mohammad Nuzaihan, Md Nor |
| title |
Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique |
| title_short |
Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique |
| title_full |
Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique |
| title_fullStr |
Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique |
| title_full_unstemmed |
Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique |
| title_sort |
negative pattern scheme (nps) design for nanowire formation using scanning electron microscope based electron beam lithography technique |
| publisher |
Trans Tech Publications |
| publishDate |
2014 |
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http://dspace.unimap.edu.my:80/dspace/handle/123456789/33557 |
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1643797210737934336 |