Low loss optimization of strip channel polysilicon waveguide fabrication
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American-Eurasian Network for Scientific Information
2014
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| Online Access: | http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159 |
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my.unimap-361592014-07-11T01:46:18Z Low loss optimization of strip channel polysilicon waveguide fabrication Mukhzeer, Mohamad Shahimin, Dr. Ang, Keng Chuan Khor, Kang Nan mukhzeer@unimap.edu.my Polysilicon Waveguide fabrication techniques Polysilicon wet cleaning Wet oxidation LPCVD Annealing Photolithography Dry etching Link to publisher's homepage at http://www.aensiweb.com Research on waveguide structures, its behaviour and material properties are very extensive for a wide range of applications. Generally, waveguides are used for optical devices such as biosensors. This paper investigates and presents an overview of the formation of waveguides using polysilicon as a waveguide material. Besides that, this paper elaborates and summarizes the important control parameters which influence the waveguide performance such as thickness, flatness, surface roughness, grain side, defects among others. The aimed that this review paper to come up with optimized parameters for the design of linear waveguides with maximum sensitivity in an evanescent field and low optical loss. 2014-07-11T01:46:18Z 2014-07-11T01:46:18Z 2013 Article Advances in Environmental Biology, vol.7(12), 2013, pages 3591-3595 19950756 http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159 http://www.aensiweb.com/old/aeb/2013/3591-3595.pdf en American-Eurasian Network for Scientific Information |
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Universiti Malaysia Perlis |
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| language |
English |
| topic |
Polysilicon Waveguide fabrication techniques Polysilicon wet cleaning Wet oxidation LPCVD Annealing Photolithography Dry etching |
| spellingShingle |
Polysilicon Waveguide fabrication techniques Polysilicon wet cleaning Wet oxidation LPCVD Annealing Photolithography Dry etching Mukhzeer, Mohamad Shahimin, Dr. Ang, Keng Chuan Khor, Kang Nan Low loss optimization of strip channel polysilicon waveguide fabrication |
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Link to publisher's homepage at http://www.aensiweb.com |
| author2 |
mukhzeer@unimap.edu.my |
| author_facet |
mukhzeer@unimap.edu.my Mukhzeer, Mohamad Shahimin, Dr. Ang, Keng Chuan Khor, Kang Nan |
| format |
Article |
| author |
Mukhzeer, Mohamad Shahimin, Dr. Ang, Keng Chuan Khor, Kang Nan |
| author_sort |
Mukhzeer, Mohamad Shahimin, Dr. |
| title |
Low loss optimization of strip channel polysilicon waveguide fabrication |
| title_short |
Low loss optimization of strip channel polysilicon waveguide fabrication |
| title_full |
Low loss optimization of strip channel polysilicon waveguide fabrication |
| title_fullStr |
Low loss optimization of strip channel polysilicon waveguide fabrication |
| title_full_unstemmed |
Low loss optimization of strip channel polysilicon waveguide fabrication |
| title_sort |
low loss optimization of strip channel polysilicon waveguide fabrication |
| publisher |
American-Eurasian Network for Scientific Information |
| publishDate |
2014 |
| url |
http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159 |
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1643798030165475328 |