Low loss optimization of strip channel polysilicon waveguide fabrication

Link to publisher's homepage at http://www.aensiweb.com

Saved in:

Bibliographic Details
Main Authors:	Mukhzeer, Mohamad Shahimin, Dr., Ang, Keng Chuan, Khor, Kang Nan
Other Authors:	mukhzeer@unimap.edu.my
Format:	Article
Language:	English
Published:	American-Eurasian Network for Scientific Information 2014
Subjects:	Polysilicon Waveguide fabrication techniques Polysilicon wet cleaning Wet oxidation LPCVD Annealing Photolithography Dry etching
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Universiti Malaysia Perlis
Language:	English

Similar Items