Heteroepitaxial growth of vacuum-evaporated Si-Ge films on nanostructured silicon substrates

Heteroepitaxial growth of vacuum-evaporated Si-Ge films on nanostructured silicon substrates

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Bibliographic Details
Main Authors: Ayu Wazira, Azhari, Kamaruzzaman, Sopian, Saleem Hussain, Zaidi
Other Authors: ayuwazira@unimap.edu.my
Format: Article
Language:English
Published: Faculty of Science and Technology, Universiti Kebangsaan Malaysia 2016
Subjects:
Heteroepitaxial growth
Metal assisted chemical etching
Nanostructured Si
Silicon germanium
Thermal evaporation
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41175
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41175

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