Application of synopsys' taurus TCAD in developing CMOS fabrication process modules

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Bibliographic Details
Main Authors:	Uda Hashim, Chin Seng Fatt, S. Sakrani
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis 2009
Subjects:	Engineering design > Data processing Technology CAD (TCAD) Computer graphics Engineering > Data processing Computer-aided design Digital integrated circuits > Design and construction Taurus TCAD
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/5339
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Institution:	Universiti Malaysia Perlis
Language:	English

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