Application of synopsys' taurus TCAD in developing CMOS fabrication process modules
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Universiti Malaysia Perlis
2009
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my.unimap-53392015-01-22T04:28:24Z Application of synopsys' taurus TCAD in developing CMOS fabrication process modules Uda Hashim Chin Seng Fatt S. Sakrani Engineering design -- Data processing Technology CAD (TCAD) Computer graphics Engineering -- Data processing Computer-aided design Digital integrated circuits -- Design and construction Taurus TCAD Link to publisher's homepage at http://ijneam.unimap.edu.my/ Technology CAD (TCAD) refers to the use of computer simulation to model semiconductor processing and devics operation. TCAD has two major functions namely process simulation and device simulation. It performs the semiconductor process simulation and the device simulation by taking the description of the transistor layout input to stimulate the fabrication process and device behavior before the actual silicon is made. this paper illustrates the use of Synopsys' Taurus TCAD to develop and stimulate the fabrication and electrical behavior of NMOS and PMOS transistors in the complete CMOS process flow. Illustration also include how mask information extracted from a layout by Taurus Layout is used by TSUPREM-4 to produce an output file containing complete structure, mesh and doping information that can be read into MEDICI device simulator to extract electrical characteristics. The specified process includes, not only steps required to stimulate a MOSFET device, but also all steps of the hypothetical CMOS process. 2009-04-06T13:45:40Z 2009-04-06T13:45:40Z 2009 Article International Journal of Nanoelectronics and Materials, vol. 2 (1), 2009, pages 1-10. 1985-5761 (Printed) 1997-4434 (Online) http://hdl.handle.net/123456789/5339 http://ijneam.unimap.edu.my/ en Universiti Malaysia Perlis |
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English |
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Engineering design -- Data processing Technology CAD (TCAD) Computer graphics Engineering -- Data processing Computer-aided design Digital integrated circuits -- Design and construction Taurus TCAD |
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Engineering design -- Data processing Technology CAD (TCAD) Computer graphics Engineering -- Data processing Computer-aided design Digital integrated circuits -- Design and construction Taurus TCAD Uda Hashim Chin Seng Fatt S. Sakrani Application of synopsys' taurus TCAD in developing CMOS fabrication process modules |
| description |
Link to publisher's homepage at http://ijneam.unimap.edu.my/ |
| format |
Article |
| author |
Uda Hashim Chin Seng Fatt S. Sakrani |
| author_facet |
Uda Hashim Chin Seng Fatt S. Sakrani |
| author_sort |
Uda Hashim |
| title |
Application of synopsys' taurus TCAD in developing CMOS fabrication process modules |
| title_short |
Application of synopsys' taurus TCAD in developing CMOS fabrication process modules |
| title_full |
Application of synopsys' taurus TCAD in developing CMOS fabrication process modules |
| title_fullStr |
Application of synopsys' taurus TCAD in developing CMOS fabrication process modules |
| title_full_unstemmed |
Application of synopsys' taurus TCAD in developing CMOS fabrication process modules |
| title_sort |
application of synopsys' taurus tcad in developing cmos fabrication process modules |
| publisher |
Universiti Malaysia Perlis |
| publishDate |
2009 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/5339 |
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1643788366065434624 |