Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition

Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition

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Bibliographic Details
Main Authors:	Muliana, Tahan, Nafarizal, Nayan, Siti Noraiza, Abd Razak, Anis Suhaili, Bakri, Zulkifli, Azman, Mohd Zainizan, Sahdan, Nur Amaliyana, Rahip, Ahmad Shuhaimi, Abu Bakar, Mohd Yazid, Ahmad
Other Authors:	nafa@uthm.edu.my
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis (UniMAP) 2020
Subjects:	Magnetron sputtering plasma GaN thin film AlN thin film Blue LED
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/67712
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Institution:	Universiti Malaysia Perlis
Language:	English

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Summary:	Link to publisher's homepage at http://ijneam.unimap.edu.my