Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition

Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition

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Bibliographic Details
Main Authors: Muliana, Tahan, Nafarizal, Nayan, Siti Noraiza, Abd Razak, Anis Suhaili, Bakri, Zulkifli, Azman, Mohd Zainizan, Sahdan, Nur Amaliyana, Rahip, Ahmad Shuhaimi, Abu Bakar, Mohd Yazid, Ahmad
Other Authors: nafa@uthm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2020
Subjects:
Magnetron sputtering plasma
GaN thin film
AlN thin film
Blue LED
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/67712
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/xmlui/handle/123456789/67712

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