A systematic dry etching process for profile control of quantum dots and nanoconstrictions

A systematic dry etching process for profile control of quantum dots and nanoconstrictions

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Bibliographic Details
Main Authors: Madnarski, Sutikno, Uda, Hashim, Zul Azhar, Zahid Jamal
Format: Article
Language:English
Published: Elsevier B.V. 2009
Subjects:
Dry etch process
Nanostructure dimension
Quantum electronics
Nanostructured materials
Nanotechnology
Quantum dot
Silicon
Nanostructures
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/6897
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/6897

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