Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor

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Bibliographic Details
Main Authors:	Zaiazmin, Y. N., Ishak, Abdul Azid
Format:	Article
Language:	English
Published:	Institute of Electrical and Electronics Engineering (IEEE) 2009
Subjects:	Digital simulation Micromechanical devices Pressure sensors Computerised instrumentation CATIA (Computer file) Computer-aided engineering ANSYS (Computer system) Sensor
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/6917
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Institution:	Universiti Malaysia Perlis
Language:	English

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