Wet transfer process for MEMS freestanding PMMA/Graphene membrane development

Wet transfer process for MEMS freestanding PMMA/Graphene membrane development

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Bibliographic Details
Main Authors: Norliana, Yusof, Badariah, Bais, Norhayati, Soin, Burhanuddin, Yeop Majlis
Other Authors: badariah@ukm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2021
Subjects:
Freestanding PMMA/Graphene
Ferric chloride etchant
PMMA/Graphene transfer
PMMA/Graphene membrane
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69850
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Institution: Universiti Malaysia Perlis
Language: English
Description
Summary:Link to publisher's homepage at http://ijneam.unimap.edu.my

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