Wet transfer process for MEMS freestanding PMMA/Graphene membrane development
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Universiti Malaysia Perlis (UniMAP)
2021
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my.unimap-698502021-02-25T01:01:27Z Wet transfer process for MEMS freestanding PMMA/Graphene membrane development Norliana, Yusof Badariah, Bais Norhayati, Soin Burhanuddin, Yeop Majlis badariah@ukm.edu.my Freestanding PMMA/Graphene Ferric chloride etchant PMMA/Graphene transfer PMMA/Graphene membrane Link to publisher's homepage at http://ijneam.unimap.edu.my Process of transferring poly (methyl methacrylate) (PMMA)/Graphene layer to form a freestanding membrane requires a proper method to ensure that the membrane is well suspended with high graphene coverage. This paper demonstrates a method for transferring PMMA/Graphene onto an etched silicon cavity, which forms freely suspended graphene using ferric chloride (FeCl3) solution. The characterisation was performed with an optical microscope and Raman spectroscopy to examine the quality of the transferred PMMA/Graphene membrane. Wet transfer process by FeCl3 etchant was successfully applied to develop a freestanding PMMA/Graphene membrane on a silicon etch cavity. From the study, 0.5M concentration of FeCl3 etchant is more suitable to be applied compared to 1.0 M in order to form a freestanding PMMA / Graphene membrane. 2021-02-25T01:01:27Z 2021-02-25T01:01:27Z 2020-12 Article International Journal of Nanoelectronics and Materials, vol.13(Special Issue), 2020, pages 275-280 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69850 en NANOSYM, 2019; Universiti Malaysia Perlis (UniMAP) |
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Freestanding PMMA/Graphene Ferric chloride etchant PMMA/Graphene transfer PMMA/Graphene membrane |
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Freestanding PMMA/Graphene Ferric chloride etchant PMMA/Graphene transfer PMMA/Graphene membrane Norliana, Yusof Badariah, Bais Norhayati, Soin Burhanuddin, Yeop Majlis Wet transfer process for MEMS freestanding PMMA/Graphene membrane development |
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Link to publisher's homepage at http://ijneam.unimap.edu.my |
| author2 |
badariah@ukm.edu.my |
| author_facet |
badariah@ukm.edu.my Norliana, Yusof Badariah, Bais Norhayati, Soin Burhanuddin, Yeop Majlis |
| format |
Article |
| author |
Norliana, Yusof Badariah, Bais Norhayati, Soin Burhanuddin, Yeop Majlis |
| author_sort |
Norliana, Yusof |
| title |
Wet transfer process for MEMS freestanding PMMA/Graphene membrane development |
| title_short |
Wet transfer process for MEMS freestanding PMMA/Graphene membrane development |
| title_full |
Wet transfer process for MEMS freestanding PMMA/Graphene membrane development |
| title_fullStr |
Wet transfer process for MEMS freestanding PMMA/Graphene membrane development |
| title_full_unstemmed |
Wet transfer process for MEMS freestanding PMMA/Graphene membrane development |
| title_sort |
wet transfer process for mems freestanding pmma/graphene membrane development |
| publisher |
Universiti Malaysia Perlis (UniMAP) |
| publishDate |
2021 |
| url |
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69850 |
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1698698671696117760 |