Design and process development of silicon nanowire based DNA biosensor using electron beam lithography

Design and process development of silicon nanowire based DNA biosensor using electron beam lithography

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Bibliographic Details
Main Authors: Uda, Hashim, Siti Fatimah, Abd Rahman, Mohammad Nuzaihan, Md Nor, Shahrir, Salleh
Other Authors: uda@unimap.edu.my
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
Subjects:
Biosensors
DNA hybridization
Electron beam lithography
Nanowire
Nanofabrication
Biomolecular electronics
Semiconductors
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7370
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/7370

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