Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
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Institute of Electrical and Electronics Engineering (IEEE)
2009
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my.unimap-73702010-11-24T02:20:50Z Design and process development of silicon nanowire based DNA biosensor using electron beam lithography Uda, Hashim Siti Fatimah, Abd Rahman Mohammad Nuzaihan, Md Nor Shahrir, Salleh uda@unimap.edu.my Biosensors DNA hybridization Electron beam lithography Nanowire Nanofabrication Biomolecular electronics Semiconductors Link to publisher's homepage at http://ieeexplore.ieee.org Silicon nanowires (SiNWs) have their unique feature such as similar diameters to biomolecules, chemically tailorable physical properties, enable to apply in biomolecule detection and can be fabricated as a high performance field effect transistor (FET). This research describes the fabrication of silicon nanowire for DNA hybridization detection in biosensor application. The silicon nanowire with line-width of <100 nm is successfully fabricated by electron beam lithography and will follow by deposition of contact metals. Aurum is a suitable metal to make Ohmic contact with SiNWs and its exhibit electrical transport measurements of the devices. The presence of the hybridization DNA will induce electronic charge and changed the electronic properties of the transistor from which detectable electronic signals are generated. 2009-12-06T02:09:25Z 2009-12-06T02:09:25Z 2008-12-01 Article p.1-6 978-1-4244-2315-6 http://ieeexplore.ieee.org/xpls/abs_all.jsp?=&arnumber=4786648 http://hdl.handle.net/123456789/7370 en International Conference on Electronic Design (ICED 2008) Institute of Electrical and Electronics Engineering (IEEE) |
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Biosensors DNA hybridization Electron beam lithography Nanowire Nanofabrication Biomolecular electronics Semiconductors |
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Biosensors DNA hybridization Electron beam lithography Nanowire Nanofabrication Biomolecular electronics Semiconductors Uda, Hashim Siti Fatimah, Abd Rahman Mohammad Nuzaihan, Md Nor Shahrir, Salleh Design and process development of silicon nanowire based DNA biosensor using electron beam lithography |
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Link to publisher's homepage at http://ieeexplore.ieee.org |
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uda@unimap.edu.my |
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uda@unimap.edu.my Uda, Hashim Siti Fatimah, Abd Rahman Mohammad Nuzaihan, Md Nor Shahrir, Salleh |
| format |
Article |
| author |
Uda, Hashim Siti Fatimah, Abd Rahman Mohammad Nuzaihan, Md Nor Shahrir, Salleh |
| author_sort |
Uda, Hashim |
| title |
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography |
| title_short |
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography |
| title_full |
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography |
| title_fullStr |
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography |
| title_full_unstemmed |
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography |
| title_sort |
design and process development of silicon nanowire based dna biosensor using electron beam lithography |
| publisher |
Institute of Electrical and Electronics Engineering (IEEE) |
| publishDate |
2009 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/7370 |
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1643788796403122176 |