A very high Q-factor inductor using MEMS technology

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Bibliographic Details
Main Authors:	Khalid, N., Shah, K., Singh, J., Le, H. P., Devlin, J., Zaliman, Sauli, Lt. Assoc. Prof.
Format:	Working Paper
Language:	English
Published:	SPIE 2010
Subjects:	High Quality (Q) factor high radio frequency (RF) Inductor Micro-electro-mechanical System (MEMS) Q-factor
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/8426
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Institution:	Universiti Malaysia Perlis
Language:	English

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