A very high Q-factor inductor using MEMS technology

• Main Authors: Khalid, N., Shah, K., Singh, J., Le, H. P., Devlin, J., Zaliman, Sauli, Lt. Assoc. Prof.
• Format: Working Paper
• Language: English
• Published: SPIE 2010
• Subjects: High Quality (Q) factor; high radio frequency (RF); Inductor; Micro-electro-mechanical System (MEMS); Q-factor
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/8426
• Institution: Universiti Malaysia Perlis

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