A very high Q-factor inductor using MEMS technology

A very high Q-factor inductor using MEMS technology

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Bibliographic Details
Main Authors: Khalid, N., Singh, J., Le, H.P., Devlin, J., Zaliman, Sauli, Prof. Madya
Format: Working Paper
Language:English
Published: IEEE 2010
Subjects:
Capacitive couplings
GHz frequencies
High Q factor
High quality
High resistivity
MEMS technology
Optimisations
Q-factors
Substrate loss
Symmetric inductors
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8435
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Institution: Universiti Malaysia Perlis
Language: English
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