A very high Q-factor inductor using MEMS technology

• Main Authors: Khalid, N., Singh, J., Le, H.P., Devlin, J., Zaliman, Sauli, Prof. Madya
• Format: Working Paper
• Language: English
• Published: IEEE 2010
• Subjects: Capacitive couplings; GHz frequencies; High Q factor; High quality; High resistivity; MEMS technology; Optimisations; Q-factors; Substrate loss; Symmetric inductors
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/8435
• Institution: Universiti Malaysia Perlis

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