Optimisation of process parameters for lower leakage current in 22 nm n-type MOSFET device using Taguchi method
In this article, Taguchi orthogonal array method was used to optimize the process parameters during the design of a 22 nm n-type Metal Oxide Semiconductor Field Effect Transistor (MOSFET) in order to decrease the leakage current (ILEAK) of the device. Titanium dioxide (TiO2) was used as the dielectr...
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Published: |
Penerbit UTM Press
2023
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| Institution: | Universiti Tenaga Nasional |