Process parameter optimisation for minimum leakage current in a 22nm p-type MOSFET using Taguchi method
In this research paper, the effects of variation on the process parameters were optimised while designing a nano-scaled p-type MOSFET (metal-oxide-semiconductor field-effect transistor) planar device for 22 nm technology. The aim of this procedure is to meet the minimum leakage current (IOFF) by opt...
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Format: | Article |
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Universiti Teknikal Malaysia Melaka
2023
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Institution: | Universiti Tenaga Nasional |
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