Process parameter optimisation for minimum leakage current in a 22nm p-type MOSFET using Taguchi method

In this research paper, the effects of variation on the process parameters were optimised while designing a nano-scaled p-type MOSFET (metal-oxide-semiconductor field-effect transistor) planar device for 22 nm technology. The aim of this procedure is to meet the minimum leakage current (IOFF) by opt...

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Bibliographic Details
Main Authors: Afifah Maheran A.H., Menon P.S., Ahmad I., Salehuddin F., Mohd Zain A.S.
Other Authors: 36570222300
Format: Article
Published: Universiti Teknikal Malaysia Melaka 2023
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Institution: Universiti Tenaga Nasional
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