Threshold voltage and leakage current variability on process parameter in a 22nm PMOS Device

This article explains the effect of variation on the process parameters while designing a Nano-scaled planar PMOS device in complementary metal-oxide-semiconductor (CMOS) technology for 22 nm gate length. This procedure aims to meet the best combination of fabrication process parameter on the thresh...

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Bibliographic Details
Main Authors: Afifah Maheran A.H., Menon P.S., Ahmad I., Noor Faizah Z.A., Mohd Zain A.S., Salehuddin F., Sayed N.M.
Other Authors: 36570222300
Format: Article
Published: Universiti Teknikal Malaysia Melaka 2023
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Institution: Universiti Tenaga Nasional