Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

• Main Authors: Mohammadpour, Ehsan, Yun, Willey Hsien Liew, Mondinos, Nicholas, Altarawneh, Mohammednoor, Lee, Sunghwan, Radevski, Nik, Minakshi, Manickam, Amri, Amun, Lim, Hong Ngee, Jiang, Zhong Tao
• Format: Article
• Published: Elsevier 2022
• Online Access: http://psasir.upm.edu.my/id/eprint/101268/; https://www.sciencedirect.com/science/article/pii/S2238785422000394
• Institution: Universiti Putra Malaysia

This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology...