Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
Dalam kajian ini, struktur get HEMT dengan gatelength bersaiz 200 nm dan berprofil cendawan telah direkabentuk, difabrikasi dan dicirikan. In this research study, 200 nm gatelength HEMT gate structures with mushroom-shaped profile have been designed, fabricated and characterized.
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://eprints.usm.my/10407/1/FABRICATION_OF_SUBMICRON_HEMT_MUSHROOM_GATE.pdf http://eprints.usm.my/10407/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |