Aluminum Nitride Thin Films Grown Sol-gel Spin Coating Technique
In this study, aluminum nitride (AIN) thin films were grown on p-type silicon (1 00) substrate by sol-gel spin coating method. Two types of ethanol-based precursors were prepared , namely, precursors with and without the aid of diethanolamine (DEA). The objective of this work is to investigate the e...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48804/1/NG17_OP07.pdf%20done.pdf http://eprints.usm.my/48804/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |
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