Effect of Low Temperature on The Fabrication of Microring Resonator by Wet Etching

• Main Authors: Haroon, Hazura, Hanim, Abdul Razak, Mardiana, Bidin, Shaari, Sahbudin, Menon, P.S, Majlis, B.Y
• Format: Article
• Language: English
• Published: Science Publications 2012
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/12260/1/ajassp.2012.1922.1928_%281%29.pdf; http://eprints.utem.edu.my/id/eprint/12260/
• Institution: Universiti Teknikal Malaysia Melaka

Research related to semiconductor devices often relies on wafer fabrication. The fabrication of Silicon (Si) based devices by anisotropic wet etching can be affected by many etching parameters such as etching temperature, crystal orientation and percent of composition. Most of the anisotropic wet...