Effect of Low Temperature on The Fabrication of Microring Resonator by Wet Etching
Research related to semiconductor devices often relies on wafer fabrication. The fabrication of Silicon (Si) based devices by anisotropic wet etching can be affected by many etching parameters such as etching temperature, crystal orientation and percent of composition. Most of the anisotropic wet...
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Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Science Publications
2012
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Subjects: | |
Online Access: | http://eprints.utem.edu.my/id/eprint/12260/1/ajassp.2012.1922.1928_%281%29.pdf http://eprints.utem.edu.my/id/eprint/12260/ |
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Institution: | Universiti Teknikal Malaysia Melaka |
Language: | English |
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