Various Doping Concentration Effect on Silicon-on-Insulator (SOI) Phase Modulator

• Main Authors: Mardiana, Bidin, Haroon, Hazura, Hanim, Abdul Razak, Sahbudin, Saari, Abdullah, H.
• Format: Conference or Workshop Item
• Language: English
• Published: 2010
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.utem.edu.my/id/eprint/13083/1/icp_ura.pdf; http://eprints.utem.edu.my/id/eprint/13083/
• Institution: Universiti Teknikal Malaysia Melaka

This paper reports the effect of doping concentration to the electrical characteristic performance of the phase modulator in the carrier injection mode at wavelength 1.55μm. The phase modulator device has been integrated in the silicon-on-insulator (SOI) rib waveguide with the p-i-n diode struc...