Screen-printed ceramic based MEMS piezoelectric cantilever for harvesting energy

• Main Authors: Kok, Swee Leong, Abdul Rani , Othman, Azizah Shaaban , Ahmad
• Format: Article
• Language: English
• Published: Trans Tech Publications 2014
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/14853/1/Advances%20in%20Science%20and%20Technology_Screen%20Printed%20Ceramic%20Based%20MEMS%20Piezoelectric%20Cantilever%20for%20Harvesting%20Enginer.pdf; http://eprints.utem.edu.my/id/eprint/14853/; http://www.scientific.net/AST.90.84
• Institution: Universiti Teknikal Malaysia Melaka

Screen-printing technology provides a convenient method in fabricating thick-film conductive circuits and devices in the past few decades. Conventionally, piezoelectric thick-film is printed on alumina substrate with high mechanical Q-factor and resonates at higher frequency outside the range of am...