Pembangunan reaktor DC PECVD dan kajian struktur filem tipis karbon amorfus terhidrogen (a-C:H)
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| Main Author: | |
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| Format: | Thesis |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/32368/ |
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| Institution: | Universiti Teknologi Malaysia |