The atomic force microscope study of self-assembled silicon nanodots growth using magnetron sputtering system
In this paper self-assembled silicon nanodots have been grown on silicon substrate using radio-frequency magnetron sputtering system. This system were settled at varying experimental conditions such as substrate temperature, time of deposition, RF power and fixed argon flow rate. Then the surface ro...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Conference or Workshop Item |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/51345/ http://dx.doi.org/10.4028/www.scientific.net/AMR.795.721 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Universiti Teknologi Malaysia |