The atomic force microscope study of self-assembled silicon nanodots growth using magnetron sputtering system
In this paper self-assembled silicon nanodots have been grown on silicon substrate using radio-frequency magnetron sputtering system. This system were settled at varying experimental conditions such as substrate temperature, time of deposition, RF power and fixed argon flow rate. Then the surface ro...
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Main Authors: | , , |
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Format: | Conference or Workshop Item |
Published: |
2013
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/51345/ http://dx.doi.org/10.4028/www.scientific.net/AMR.795.721 |
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Institution: | Universiti Teknologi Malaysia |