Ultra shallow junctions in CMOS devices

This congress will comprise 10 professional parallel forums including Advanced Nanomaterials, Nanomedicine and Nanobiotechnology, etc. The main objective of Nano S&T-2015 is to provide a comprehensive global platform for experts and participants from government, academia, enterprise, and other o...

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Bibliographic Details
Main Authors: Satoru, Matsumoto, Aid, Siti Rahmah
Format: Conference or Workshop Item
Published: 2015
Subjects:
Online Access:http://eprints.utm.my/id/eprint/60623/
http://www.osa.org/en-us/meetings/global_calendar/events/2015/the_5th_annual_world_congress_of_nano_science_and/
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Institution: Universiti Teknologi Malaysia

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