Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties

Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties

Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized...

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Main Authors: Keng Yik, Jackie Chen, Deraman, Karim, Ong, Wai Kit, Wan Shamsuri, Wan Nurulhuda, Hussin, Rosli
Format: Article
Published: Trans Tech Publications 2014
Subjects:
Q Science
Online Access:http://eprints.utm.my/id/eprint/63158/
http://dx.doi.org/10.4028/www.scientific.net/AMR.970.136
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Institution: Universiti Teknologi Malaysia
id my.utm.63158
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spelling my.utm.631582017-06-15T02:09:15Z http://eprints.utm.my/id/eprint/63158/ Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties Keng Yik, Jackie Chen Deraman, Karim Ong, Wai Kit Wan Shamsuri, Wan Nurulhuda Hussin, Rosli Q Science Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized medium. The AFM image reveals that the optimization of DLC films growth at the substrate temperature 400 °C has a significant surface roughness and average grain size which is compatible to the result of film thickness measurement. The sample J400 shows an excellent nonlinear rectifying diode-like characteristic across the small potential difference. Trans Tech Publications 2014 Article PeerReviewed Keng Yik, Jackie Chen and Deraman, Karim and Ong, Wai Kit and Wan Shamsuri, Wan Nurulhuda and Hussin, Rosli (2014) Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties. Advanced Materials Research, 970 . pp. 136-139. ISSN 1022-6680 http://dx.doi.org/10.4028/www.scientific.net/AMR.970.136 DOI :10.4028/www.scientific.net/AMR.970.136
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic Q Science
spellingShingle Q Science
Keng Yik, Jackie Chen
Deraman, Karim
Ong, Wai Kit
Wan Shamsuri, Wan Nurulhuda
Hussin, Rosli
Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
description Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized medium. The AFM image reveals that the optimization of DLC films growth at the substrate temperature 400 °C has a significant surface roughness and average grain size which is compatible to the result of film thickness measurement. The sample J400 shows an excellent nonlinear rectifying diode-like characteristic across the small potential difference.
format Article
author Keng Yik, Jackie Chen
Deraman, Karim
Ong, Wai Kit
Wan Shamsuri, Wan Nurulhuda
Hussin, Rosli
author_facet Keng Yik, Jackie Chen
Deraman, Karim
Ong, Wai Kit
Wan Shamsuri, Wan Nurulhuda
Hussin, Rosli
author_sort Keng Yik, Jackie Chen
title Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
title_short Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
title_full Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
title_fullStr Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
title_full_unstemmed Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
title_sort undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
publisher Trans Tech Publications
publishDate 2014
url http://eprints.utm.my/id/eprint/63158/
http://dx.doi.org/10.4028/www.scientific.net/AMR.970.136
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