Reflectance characteristics of silicon surface fabricated with the arrays of uniform inverted pyramid microstructures in UV-visible range

• Main Authors: Abdullah, Mohd. Faizol, Hashim, Abdul Manaf
• Format: Article
• Language: English
• Published: Penerbit UKM 2019
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.utm.my/id/eprint/89260/1/MohdFaizolAbdullah2019_ReflectanceCharacteristicsofSiliconSurfaceFabricated.pdf; http://eprints.utm.my/id/eprint/89260/; http://dx.doi.org/10.17576/jsm-2019-4806-02
• Institution: Universiti Teknologi Malaysia

In this paper, inverted pyramidal microstructures are designed and fabricated on silicon (Si) surface. The characteristics of surface reflectance are simulated using two-dimensional (2D) finite-difference time-domain (FDTD) method by varying the spacing (S) and width (W) of the pyramidal microstruct...