A systematic review of deep learning for silicon wafer defect recognition

• Main Authors: Batool, U., Shapiai, M. I., Tahir, M., Ismail, Z. H., Zakaria, N. J., Elfakharany, A.
• Format: Article
• Language: English
• Published: Institute of Electrical and Electronics Engineers Inc. 2021
• Subjects: TP Chemical technology
• Online Access: http://eprints.utm.my/id/eprint/95105/1/UzmaBatool2021_ASystematicReviewofDeepLearning.pdf; http://eprints.utm.my/id/eprint/95105/; http://dx.doi.org/10.1109/ACCESS.2021.3106171
• Institution: Universiti Teknologi Malaysia

Advancements in technology have made deep learning a hot research area, and we see its applications in various fields. Its widespread use in silicon wafer defect recognition is replacing traditional machine learning and image processing methods of defect monitoring. This article presents a review of...