Characterization of MEMS comb capacitor

Characterization of MEMS comb capacitor

With the advancement of micro-electro-mechanical systems (MEMS) technologies, it is compulsory to have the sources which power the micro devices at micron scale. Due to the miniaturization, compactness, inexpensive and ease of integration with the standard process compatibility, CMOS-MEMS capacitor...

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Bibliographic Details
Main Authors: Ahmad, F., Baig, A., Dennis, J.O., Hamid, N.H.B., Md Khir, M.H.B.
Format: Article
Published: Springer 2020
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85074821029&doi=10.1007%2fs00542-019-04671-1&partnerID=40&md5=035e24e498e25b1f2e7bc2b77ba0a26f
http://eprints.utp.edu.my/23238/
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Institution: Universiti Teknologi Petronas

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-85074821029&doi=10.1007%2fs00542-019-04671-1&partnerID=40&md5=035e24e498e25b1f2e7bc2b77ba0a26f
http://eprints.utp.edu.my/23238/

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