Characterization of MEMS comb capacitor

• Main Authors: Ahmad, F., Baig, A., Dennis, J.O., Hamid, N.H.B., Md Khir, M.H.B.
• Format: Article
• Published: Springer 2020
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85074821029&doi=10.1007%2fs00542-019-04671-1&partnerID=40&md5=035e24e498e25b1f2e7bc2b77ba0a26f; http://eprints.utp.edu.my/23238/
• Institution: Universiti Teknologi Petronas

With the advancement of micro-electro-mechanical systems (MEMS) technologies, it is compulsory to have the sources which power the micro devices at micron scale. Due to the miniaturization, compactness, inexpensive and ease of integration with the standard process compatibility, CMOS-MEMS capacitor...